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SPIE Proceedings [SPIE OPTIKA '98: Fifth Congress on Modern Optics - Budapest, Hungary (Monday 14 September 1998)] OPTIKA '98: 5th Congress on Modern Optics - Optical correlation technique for measurement of roughness at microfacets of reflection-type diffraction gratings
Angelsky, Oleg V., Maksimyak, Peter P., Akos, Gyorgy, Lupkovics, Gabor, Podmaniczky, AndrasVolume:
3573
Year:
1998
Language:
english
DOI:
10.1117/12.321020
File:
PDF, 102 KB
english, 1998