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SPIE Proceedings [SPIE Photonics East (ISAM, VVDC, IEMB) - Boston, MA (Sunday 1 November 1998)] Microrobotics and Micromanipulation - Silicon microgripper for microassembly realized by photolithography and fast anisotropic silicon etching
Hoche, Jens H., Buettgenbach, Stephanus, Pittschellis, Reinhard, Hesselbach, Juergen, Sulzmann, Armin, Nelson, Bradley J.Volume:
3519
Year:
1998
Language:
english
DOI:
10.1117/12.325745
File:
PDF, 1.22 MB
english, 1998