![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays - TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers
Taylor, Patrick A., Dawson, Dean J., Stover, John C.Volume:
3619
Year:
1999
Language:
english
DOI:
10.1117/12.343707
File:
PDF, 856 KB
english, 1999