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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Doping and structural properties for the phosphorous-doped polysilicon layers used for micromechanical applications
Gaiseanu, Florin, Esteve, Jaume, Cane, Carles, Perez-Rodriguez, Alejandro, Morante, Juan R., Serre, Christoph, Smith, James H., Karam, Jean MichelVolume:
3874
Year:
1999
Language:
english
DOI:
10.1117/12.361246
File:
PDF, 576 KB
english, 1999