![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SIOEL: Sixth Symposium of Optoelectronics - Bucharest, Romania (Wednesday 22 September 1999)] SIOEL '99: Sixth Symposium on Optoelectronics - Plasma analysis in the process of pulsed laser deposition of aluminium nitride and titan nitride thin films
Grigoriu, Constantin, Apostol, Ileana, Rizea, Roxana, Marcu, Aurelian, Dragulinescu, Dumitru, Necsoiu, Teodor, Robu, Maria, Dumitras, Dan C.Volume:
4068
Year:
2000
Language:
english
DOI:
10.1117/12.378674
File:
PDF, 1.93 MB
english, 2000