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SPIE Proceedings [SPIE 4th International Conference on Thin Film Physics and Applications - Shanghai, China (Monday 8 May 2000)] Fourth International Conference on Thin Film Physics and Applications - Measuring rotating substrate temperature by laser
Lu, Siyuan, Ma, Xiufang, Shen, Yuanhua, Chu, Junhao, Liu, Pulin, Chang, YongVolume:
4086
Year:
2000
Language:
english
DOI:
10.1117/12.408402
File:
PDF, 651 KB
english, 2000