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SPIE Proceedings [SPIE Symposium on Integrated Optics - San Jose, CA (Saturday 20 January 2001)] Functional Integration of Opto-Electro-Mechanical Devices and Systems - Four-function optical switch with LIGA alignment plates
Kemme, Shanalyn A., Blum Spahn, Olga, Christenson, Todd R., Sweatt, William C., Wendt, Joel R., Peters, D. W., Carter, T. R., Samora, S., Descour, Michael R., Rantala, Juha T.Volume:
4284
Year:
2001
Language:
english
DOI:
10.1117/12.426865
File:
PDF, 2.20 MB
english, 2001