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SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Advances in Microelectronic Device Technology - Design and simulation of a novel piezoresistive accelerometer for high accuracy and overload ability
Zhang, Wei, Cao, Xinping, Liu, Bei, Zhang, Dacheng, Tong, Qin-Yi, Goesele, Ulrich M.Volume:
4600
Year:
2001
Language:
english
DOI:
10.1117/12.444673
File:
PDF, 112 KB
english, 2001