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SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - Waveguide microinterferometry system for microelements investigation
Salbut, Leszek A., Jozwik, Michal, Gorecki, Christophe, Lee, Seung S., Gorecki, Christophe, Jueptner, Werner P. O., Kujawinska, MalgorzataVolume:
4400
Year:
2001
Language:
english
DOI:
10.1117/12.445596
File:
PDF, 342 KB
english, 2001