SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Advances in Laboratory-based X-Ray Sources and Optics II - Compact high-power laser-plasma x-ray source for lithography
Gaeta, Celestino J., Rieger, Harry, Turcu, I. C. Edmond, Forber, Richard A., Campeau, S. M., Cassidy, Kelly L., Powers, Michael F., Grygier, Robert K., Maldonado, Juan R., French, G., Naunguyan, Joe RVolume:
4502
Year:
2001
Language:
english
DOI:
10.1117/12.449863
File:
PDF, 1.31 MB
english, 2001