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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing - Effects of nitrogen plasma immersion ion implantation in silicon

Kumar, Raj, Kumar, Mukesh, George, P. J., Chari, K. S., Mukherjee, Subroto, Knystautas, Emile J., Kirk, Wiley P., Browning, Valerie
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Volume:
4468
Year:
2001
Language:
english
DOI:
10.1117/12.452548
File:
PDF, 1.85 MB
english, 2001
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