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SPIE Proceedings [SPIE ECO4 (The Hague '91) - The Hague, Netherlands (Monday 11 March 1991)] Excimer Lasers and Applications III - Investigations on excimer-laser-treated Cu/Cr contact materials
Schubert, Emil, Rosiwal, S., Bergmann, Hans W., Letardi, Tommaso, Laude, Lucien D.Volume:
1503
Year:
1991
Language:
english
DOI:
10.1117/12.46942
File:
PDF, 646 KB
english, 1991