SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Smart Structures, Devices, and Systems - Towards MEMS-based infrared tunable microspectrometers
Antoszewski, Jarek, Dell, John M., Shivakumar, Thananjeyan, Martyniuk, Mariusz, Winchester, Kevin, Wehner, Justin, Musca, Charles A., Faraone, Lorenzo, Harvey, Erol C., Abbott, Derek, Varadan, Vijay KVolume:
4935
Year:
2002
Language:
english
DOI:
10.1117/12.476343
File:
PDF, 236 KB
english, 2002