SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Reliability, Testing, and Characterization of MEMS/MOEMS II - Reciprocating silicon microtribometer

Dubois, Philippe, von Gunten, Stephane, Enzler, August, Lippuner, Urs, Dommann, Alex, de Rooij, Nicolaas-F., Ramesham, Rajeshuni, Tanner, Danelle M.
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Volume:
4980
Year:
2003
Language:
english
DOI:
10.1117/12.478200
File:
PDF, 1.05 MB
english, 2003
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