SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Evaluation of a rapid prototyping process for microsystems for silicon microstructures
Bange, Stefan, Herding, Mark, Woias, Peter, Yasaitis, John A., Perez-Maher, Mary Ann, Karam, Jean MichelVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.478295
File:
PDF, 1.22 MB
english, 2003