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SPIE Proceedings [SPIE Electronic Imaging 2003 - Santa Clara, CA (Monday 20 January 2003)] Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas - TFT threshold voltage adjustment with in-situ doped PVD silicon films
Droes, Steven R. T., Atkinson, Mikel M., Guthrie, Patrick R., Crowder, Mark A., Voutsas, Apostolos T., Voutsas, Apostolos T.Volume:
5004
Year:
2003
Language:
english
DOI:
10.1117/12.482596
File:
PDF, 135 KB
english, 2003