SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Design and Process Integration for Microelectronic Manufacturing - Improved manufacturability by OPC based on defocus data
Thiele, Jorg, Anke, Ines, Haffner, Henning, Semmler, Armin, Starikov, AlexanderVolume:
5042
Year:
2003
DOI:
10.1117/12.485251
File:
PDF, 622 KB
2003