SPIE Proceedings [SPIE Smart Materials, Structures, and Systems - Bangalore, India (Thursday 12 December 2002)] Smart Materials, Structures, and Systems - 2D simulation of multilayered MEMS structures
Apte, Prakash R., Chandorkar, Saurabh A., Gandhi, Prasanna S., Mohan, S., Dattaguru, B., Gopalakrishnan, S.Volume:
5062
Year:
2003
Language:
english
DOI:
10.1117/12.514905
File:
PDF, 424 KB
english, 2003