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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Large-output-force out-of-plane MEMS actuator array
Chiao, Jung-Chih, Fukushige, Takashi, Hata, Seiichi, Hariz, Alex J., Jamieson, David N., Shimokohbe, Akira, Parish, Giacinta, Varadan, Vijay K.Volume:
5276
Year:
2003
Language:
english
DOI:
10.1117/12.521842
File:
PDF, 501 KB
english, 2003