SPIE Proceedings [SPIE Microelectronics, MEMS, and...

  • Main
  • SPIE Proceedings [SPIE...

SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Large-output-force out-of-plane MEMS actuator array

Chiao, Jung-Chih, Fukushige, Takashi, Hata, Seiichi, Hariz, Alex J., Jamieson, David N., Shimokohbe, Akira, Parish, Giacinta, Varadan, Vijay K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
5276
Year:
2003
Language:
english
DOI:
10.1117/12.521842
File:
PDF, 501 KB
english, 2003
Conversion to is in progress
Conversion to is failed