SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - Analog micro-optics fabrication by use of a binary phase grating mask
Sung, Jinwon, Johnson, Eric G., Nordin, Gregory P., Pitchumani, Mahesh, Brown, Jeremiah, Hockel, Heidi, Johnson, Eric G.Volume:
5347
Year:
2004
Language:
english
DOI:
10.1117/12.522221
File:
PDF, 187 KB
english, 2004