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SPIE Proceedings [SPIE 19th Congress of the International Commission for Optics: Optics for the Quality of Life - Firenze, Italy (Sunday 25 August 2002)] 19th Congress of the International Commission for Optics: Optics for the Quality of Life - 3-D surface profile measurement by 2-D heterodyne low-coherence interferometer
Matsumoto, Hirokazu, Hirai, Akiko, Righini, Giancarlo C., Consortini, AnnaVolume:
4829
Year:
2003
Language:
english
DOI:
10.1117/12.530945
File:
PDF, 71 KB
english, 2003