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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS and Miniaturized Systems V - Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer
Gorecki, Christophe, El-Fatatry, Ayman, Nieradko, Lukasz, Sabac, Andrei, Jozwik, Michal, Jackobelli, Alain, Dean, Thierry, Hoffman, Rolf, Bertz, AndreasVolume:
5719
Year:
2005
Language:
english
DOI:
10.1117/12.592237
File:
PDF, 881 KB
english, 2005