SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Imaging study of positive and negative tone weak phase-shifted 65 nm node contacts
Beach, James V., Smith, Bruce W., Petersen, John S., Greenway, Robert T., Maslow, Mark J., MacDonald, Susan S., Margolis, Lee H., Hughes, Gregory P.Volume:
5754
Year:
2005
Language:
english
DOI:
10.1117/12.598535
File:
PDF, 823 KB
english, 2005