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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - High durable mold fabricated with hot-embossing a sol-gel derived organically modified silicate film
Ito, Eri, Mackay, R. Scott, Hasui, Kenjiro, Tomiki, Masahiro, Okamoto, NaomichiVolume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.602434
File:
PDF, 211 KB
english, 2005