SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Fabrication and characterization of piezoelectric cantilever for micro transducers
Xie, Jin, Hu, Min, Ling, Shih-Fu, Du, Hejun, Lopez, Jose F., Quan, Chenggen, Chau, Fook Siong, Fernandez, Francisco V., Lopez-Villegas, Jose Maria, Asundi, Anand, Wong, Brian Stephen, de la Rosa, JoseYear:
2012
Language:
english
DOI:
10.1117/12.621532
File:
PDF, 357 KB
english, 2012