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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Microfluidics, BioMEMS, and Medical Microsystems IV - Monolithic single mode SU-8 waveguides for integrated optics
Nordström, Maria, Papautsky, Ian, Wang, Wanjun, Zauner, Dan A., Boisen, Anja, Hübner, JörgVolume:
6112
Year:
2006
Language:
english
DOI:
10.1117/12.644514
File:
PDF, 2.40 MB
english, 2006