SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - Orlando, Florida , USA (Wednesday 24 May 2006)] Optomechanical Technologies for Astronomy - Large sputtering coating plant working with a mode of scan
Guo, Weiyuan, Atad-Ettedgui, Eli, Antebi, Joseph, Lemke, DietrichVolume:
6273
Year:
2006
Language:
english
DOI:
10.1117/12.670158
File:
PDF, 437 KB
english, 2006