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SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - Orlando, Florida , USA (Wednesday 24 May 2006)] Optomechanical Technologies for Astronomy - Large sputtering coating plant working with a mode of scan

Guo, Weiyuan, Atad-Ettedgui, Eli, Antebi, Joseph, Lemke, Dietrich
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Volume:
6273
Year:
2006
Language:
english
DOI:
10.1117/12.670158
File:
PDF, 437 KB
english, 2006
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