SPIE Proceedings [SPIE Third International Symposium on Precision Mechanical Measurements - Urumqi, China (Wednesday 2 August 2006)] Third International Symposium on Precision Mechanical Measurements - A linear diffraction grating interferometer with high accuracy
Fan, Kuang-Chao, Liu, Yu-Sheng, Chen, Ye-Jin, Cheng, FangVolume:
6280
Year:
2006
Language:
english
DOI:
10.1117/12.715260
File:
PDF, 562 KB
english, 2006