SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Microelectronics: Design, Technology, and Packaging III - Surface topography in mechanical polishing of 6H-SiC (0001) substrate
Yin, Ling, Hariz, Alex J., Varadan, Vijay K., Huang, HanVolume:
6798
Year:
2007
Language:
english
DOI:
10.1117/12.758612
File:
PDF, 890 KB
english, 2007