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SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings
Mercado, Ramil-Marcelo L., Chen, Alek C., Lin, Burn, Xu, Hao, Lowes, Joyce A., Yen, Anthony, Meador, Jim D., Guerrero, Douglas J.Volume:
7140
Year:
2008
Language:
english
DOI:
10.1117/12.804743
File:
PDF, 622 KB
english, 2008