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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II - Diffraction gratings for compact integrated optical structures
Salakhutdinov, Ildar, Suleski, Thomas J., Schoenfeld, Winston V., Auner, Gregory W., Wang, Jian J.Volume:
7205
Year:
2009
Language:
english
DOI:
10.1117/12.809029
File:
PDF, 817 KB
english, 2009