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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII - An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators
Wong, C.-L., Kullberg, Richard C., Ramesham, Rajeshuni, Palaniapan, M.Volume:
7206
Year:
2009
Language:
english
DOI:
10.1117/12.809995
File:
PDF, 525 KB
english, 2009