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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California (Sunday 1 August 2010)] Instrumentation, Metrology, and Standards for Nanomanufacturing IV - Assessment of the mechanical integrity of silicon and diamond-like-carbon coated silicon atomic force microscope probes
Liu, Jingjing, Postek, Michael T., Grierson, David S., Sridharan, Kumar, Carpick, Robert W., Turner, Kevin T.Volume:
7767
Year:
2010
Language:
english
DOI:
10.1117/12.861789
File:
PDF, 3.12 MB
english, 2010