SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Investigation on micromachining technologies for the realization of LTCC devices and systems
Haas, T., Schmid, Ulrich, Sánchez-Rojas, José Luis, Zeilmann, C., Bittner, A., Leester-Schaedel, Monika, Schmid, U.Volume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.887603
File:
PDF, 8.06 MB
english, 2011