SPIE Proceedings [SPIE Seventh International Conference on Thin Film Physics and Applications - Shanghai, China (Friday 24 September 2010)] Seventh International Conference on Thin Film Physics and Applications - Polymer films as planarization and sacrificial layers for uncooled infrared focal plane arrays
Liu, Huan, Chu, Junhao, Wang, Zhanshan, Liu, Weiguo, Cai, Changlong, Zhou, ShunVolume:
7995
Year:
2010
Language:
english
DOI:
10.1117/12.888597
File:
PDF, 474 KB
english, 2010