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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Numerical noise reduction via diffraction for surface profiling interferometry
Toba, Hidemitsu, Lehmann, Peter H., Osten, Wolfgang, Nakayama, Shigeru, Homma, Hideaki, Gastinger, Kay, Gemma, Takashi, Uchikawa, KiyoshiVolume:
8082
Year:
2011
Language:
english
DOI:
10.1117/12.888918
File:
PDF, 546 KB
english, 2011