SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Fringe pattern characterization by OPD analysis in a lateral shearing interferometric profilometer
Frade, María, Lehmann, Peter H., Osten, Wolfgang, Enguita, José María, Álvarez, Ignacio, Gastinger, Kay, Rodríguez-Jiménez, SilviaVolume:
8082
Year:
2011
Language:
english
DOI:
10.1117/12.889267
File:
PDF, 2.29 MB
english, 2011