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SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Lasers in Microlithography - Photoetching Of Polymers With Excimer Lasers
Liu, Y. S., Cole, H. S., Philipp, H. R., Guida, R., Batchelder, John S., Ehrlich, Daniel J., Tsao, Jeff Y.Volume:
774
Year:
1987
Language:
english
DOI:
10.1117/12.940398
File:
PDF, 2.80 MB
english, 1987