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SPIE Proceedings [SPIE 1988 Semiconductor Symposium - Newport Beach, CA (Monday 14 March 1988)] Spectroscopic Characterization Techniques for Semiconductor Technology III - Quantitative Depth Profiling Analysis Of (Al,Ga)As Structures By Secondary Neutral Mass Spectrometry (SNMS)
Kelly, Nicola, Kaiser, Ulrich, Glembocki, Orest J., Pollak, Fred H., Ponce, Fernando A.Volume:
946
Year:
1988
Language:
english
DOI:
10.1117/12.947431
File:
PDF, 439 KB
english, 1988