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Fabrication and Characteristics of High Capacitance Al Thin Films Capacitor Using a Polymer Inhibitor Bath in Electroless Plating Process
Cho, Young-Lae, Lee, Jung-Woo, Lee, Chang-Hyoung, Choi, Hyung-Seon, Kim, Sung-Su, Song, Young II, Park, Chan, Suh, Su-JeongVolume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.11437
Date:
October, 2015
File:
PDF, 8.51 MB
english, 2015