A method to measure the total scattering cross section and...

A method to measure the total scattering cross section and effective beam gas path length in a low-vacuum SEM

J. Rattenberger, J. Wagner, H. Schröttner, S. Mitsche, A. Zankel
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Volume:
31
Year:
2009
Language:
english
Pages:
7
DOI:
10.1002/sca.20148
File:
PDF, 264 KB
english, 2009
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