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Application of the low-loss scanning electron microscope image to integrated circuit technology. Part II— chemically-mechanically planarized samples
Oliver C. Wells, Maurice McGlashan-Powell, András E. Vladár, Michael T. PostekVolume:
23
Year:
2001
Language:
english
Pages:
6
DOI:
10.1002/sca.4950230602
File:
PDF, 1.49 MB
english, 2001