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Measurement technique for the incident electron current in secondary electron detectors and its application in scanning electron microscopes
Toshihide Agemura, Satoru Fukuhara, Hideo TodokoroVolume:
23
Year:
2001
Language:
english
Pages:
7
DOI:
10.1002/sca.4950230607
File:
PDF, 760 KB
english, 2001