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Composition and stress analysis in Si structures using micro-raman spectroscopy
J. McCarthy, T. S. Perova, R. A. Moore, S. Bhattacharya, H. Gamble, B. M. ArmstrongVolume:
26
Year:
2004
Language:
english
Pages:
5
DOI:
10.1002/sca.4950260504
File:
PDF, 210 KB
english, 2004