Analysis of point fabrication model for near-field...

Analysis of point fabrication model for near-field photolithography with experimental study

Zone-Ching Lin, Ching-Been Yang
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Volume:
28
Year:
2006
Language:
english
Pages:
10
DOI:
10.1002/sca.4950280106
File:
PDF, 815 KB
english, 2006
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