![](/img/cover-not-exists.png)
Resolution limit for electron beam-induced deposition on thick substrates
C. W. Hagen, N. Silvis-Cividjian, P. KruitVolume:
28
Year:
2006
Language:
english
Pages:
8
DOI:
10.1002/sca.4950280402
File:
PDF, 688 KB
english, 2006