Surface and structure analysis of ultrathin multilayer structures for copper diffusion studies
Y.-M. Sun, S. Y. Lee, A. Lemonds, J. Lozano, J.-P. Zhou, J. G. Ekerdt, J. M. White, I. ImeshVolume:
32
Year:
2001
Language:
english
Pages:
5
DOI:
10.1002/sia.1010
File:
PDF, 307 KB
english, 2001