Analysis of inhomogeneous thin films of ZrO2 by the...

Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy

D. Franta, I. Ohlídal, P. Klapetek, P. Pokorný, M. Ohlídal
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Volume:
32
Year:
2001
Language:
english
Pages:
4
DOI:
10.1002/sia.1013
File:
PDF, 129 KB
english, 2001
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