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Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy
D. Franta, I. Ohlídal, P. Klapetek, P. Pokorný, M. OhlídalVolume:
32
Year:
2001
Language:
english
Pages:
4
DOI:
10.1002/sia.1013
File:
PDF, 129 KB
english, 2001