Application of focused ion beam lift-out specimen...

Surface and Interface Analysis 2001 Vol. 31; Iss. 5

Application of focused ion beam lift-out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis

F. A. Stevie, C. B. Vartuli, L. A. Giannuzzi, T. L. Shofner, S. R. Brown, B. Rossie, F. Hillion, R. H. Mills, M. Antonell, R. B. Irwin, B. M. Purcell
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Volume:
31
Year:
2001
Language:
english
Pages:
7
DOI:
10.1002/sia.1063
File:
PDF, 432 KB
english, 2001
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