Comparison of the Tougaard, ARXPS, RBS and ellipsometry...

Surface and Interface Analysis 2002 Vol. 33; Iss. 3

Comparison of the Tougaard, ARXPS, RBS and ellipsometry methods to determine the thickness of thin SiO2 layers

B. S. Semak, C. van der Marel, S. Tougaard
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Volume:
33
Year:
2002
Language:
english
Pages:
7
DOI:
10.1002/sia.1206
File:
PDF, 151 KB
english, 2002
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